Helios NanoLab 600i DualBeam FIB/SEM
The Helios NanoLab 600i is a versatile, high-performance DualBeam system containing a Ga+ focused ion beam (FIB) (500eV–30keV) together with a FEG extreme high-resolution scanning electron microscope (SEM) and Si-drift EDX detector for element analyses. This allows selective etching of materials while imaging the process and the area of interest at the same time with sub-nanometer resolution. In addition, the system is equipped with a gas injection system (GIS) containing a Pt source and an Omniprobe Autoprobe 200 nano-manipulator, with 10 nm positioning resolution for micro-manipulation of the specimen. This enables the Helios 600i for high-quality, site-specific TEM specimen preparation with in situ lift-out. Slice-and-view experiments can also be performed. The instrument is outfitted with an electron backscattered diffraction (EBSD) system, which allows for crystallographic determination on the nanoscale, and, along with imaging capabilities, 3D reconstructions of the material composition and crystallography.